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Home (MiNaLab)
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Cleanroom laboratory processing
MiNaLab cleanroom laboratory
Reactive Ion Etching (RIE)
Wafer bonding
PZT and other non-CMOS-compatible materials
Silicon radiation sensors
Pad-, Microstrip- and Pixel-detectors
Drift Chambers
Optical detectors
Avalanche photodiodes
3D detectors
Micro electro-mechanical systems (MEMS)
Pressure sensors
Inertial sensors
Micro acoustic devices
Micro opto-electro-mechanical systems (MOEMS)
Microfluidics and lab-on-a-chip
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Environmental monitoring
Medical and biomedical
Demanding environments
Automotive applications
Scientific instrumentation
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